MEMS for Geophysicists

Input/Output, Inc. has developed a MEMS accelerometer<br>to use as a seismic sensor for oil and gas exploration.<br>Currently, moving coil inductive geophones are used as<br>seismic sensors. Geophone design and performance have<br>evolved for more than 50 years to the point that modern<br>geophones are small, rugged, highly sensitive to motion,<br>and produce minimal background noise. Achieving<br>performance superior to a modern geophone with a<br>MEMS accelerometer has been a significant technical<br>challenge, but other benefits enabled by MEMS and<br>accelerometer technology, such as direct digital output at<br>the sensor, inherent high vector fidelity, and superior lowfrequency<br>response, justify the effort.